JPH0320433U - - Google Patents
Info
- Publication number
- JPH0320433U JPH0320433U JP7902889U JP7902889U JPH0320433U JP H0320433 U JPH0320433 U JP H0320433U JP 7902889 U JP7902889 U JP 7902889U JP 7902889 U JP7902889 U JP 7902889U JP H0320433 U JPH0320433 U JP H0320433U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- installation area
- gas phase
- revolve
- rotate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7902889U JPH0320433U (en]) | 1989-07-04 | 1989-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7902889U JPH0320433U (en]) | 1989-07-04 | 1989-07-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0320433U true JPH0320433U (en]) | 1991-02-28 |
Family
ID=31622825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7902889U Pending JPH0320433U (en]) | 1989-07-04 | 1989-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0320433U (en]) |
-
1989
- 1989-07-04 JP JP7902889U patent/JPH0320433U/ja active Pending